| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6988d9908404fcf44b715ec2daa9e579 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 |
| filingDate |
2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce8d2c69ee768a90ffc1fe8ce9241c03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2aafcacb8da20b8dc4b64543bfa5a4c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56f8fd2f78736efbb6827830bdfc9bb9 |
| publicationDate |
2009-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009287006-A |
| titleOfInvention |
Coating liquid for forming silica-based coating, method for forming low-dielectric-constant silica-based coating, and low-dielectric-constant silica-based coating obtained from the method |
| abstract |
PROBLEM TO BE SOLVED: To provide a coating liquid for forming a silica-based film containing nano-sized silica fine particles, a method for forming a low dielectric constant silica-based film on a substrate using the coating liquid, and a low temperature obtained from the method. It relates to a dielectric constant silica-based coating. SOLUTION: Formation of a silica-based film containing at least zeolite crystal nano-sized silica fine particles and tetraalkylammonium hydroxide (TAAOH) substantially free of impurities composed of at least an alkali metal element compound and a halogen group element compound A low dielectric constant silica-based coating film that has a low dielectric constant silica-based coating method using a coating liquid and superheated steam, and has low leakage current and also has heat resistance and moisture resistance. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8846200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9540519-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9556513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2554602-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9340869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9365922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8865810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101476020-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015511639-A |
| priorityDate |
2008-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |