http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009212135-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6759de19f29f2b6021fa5d6cafc6fb50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_629b4fc09ce39ab167a9cb0085c9e887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f049358f2240179814bb0a894f5a11a7 |
| publicationDate | 2009-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009212135-A |
| titleOfInvention | Micropattern manufacturing method |
| abstract | A method of manufacturing a micropattern capable of easily and accurately forming a micropattern on a substrate is obtained. SOLUTION: A step of preparing a substrate 6 on which a micropattern is formed on an upper surface 6a, and a film-like patterning material 1A having a pattern shape reversed with respect to the micropattern; A step of laminating on the upper surface of the substrate 6; a step of applying a patterning material 7 on the upper surface of the substrate 6 on which the film-like patterning material 1A is laminated; and removing the film-like patterning material 1A from the upper surface 6a of the substrate 6 Then, the patterning material 7 is patterned so as to be a micropattern reversed with the film-shaped patterning material 1A, thereby forming a micropattern 7A made of the patterning material 7. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015145538-A |
| priorityDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 109.