http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009190121-A

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publicationDate 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009190121-A
titleOfInvention Polishing pad, polishing pad manufacturing method, and semiconductor device manufacturing method
abstract Disclosed is a polishing pad with improved water resistance while polishing, while maintaining high dimensional stability during moisture absorption or water absorption while having high water absorption. An isocyanate-terminated prepolymer A obtained by reacting a prepolymer raw material composition containing a diisocyanate, a high molecular weight polyol a, and a low molecular weight polyol, and an isocyanate modified product obtained by adding three or more diisocyanates. And a high molecular weight polyol b having a number average molecular weight of 1000 to 2000, and a prepolymer raw material composition having an NCOindex (isocyanate group / active hydrogen group equivalent ratio) of 3.5 to 7.0. A reaction cured product of a polyurethane raw material composition containing an isocyanate-terminated prepolymer B and a chain extender, and a polishing layer made of a polyurethane foam having fine bubbles is used. [Selection] Figure 1
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