http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009187984-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_504141c248f62d92ab25a0465303e736 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7329d179945013227cc23b0ee2c6de0c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1554bb82bab1c764c7532090ad80437 |
| publicationDate | 2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009187984-A |
| titleOfInvention | Polishing composition and polishing method using the same |
| abstract | Disclosed is a polishing composition that can be more suitably used for polishing polysilicon and a polishing method using the same. The polishing composition of the present invention contains an anionic surfactant having monooxyethylene groups or polyoxyethylene groups and abrasive grains, and has a pH of 9-12. When the anionic surfactant in the polishing composition has a polyoxyethylene group, the number of repeating oxyethylene units of the polyoxyethylene group is preferably 2 to 8. As an anionic surfactant contained in polishing composition, what further has a phosphate group, a carboxy group, or a sulfo group can be used. The content of the anionic surfactant in the polishing composition is preferably 20 to 500 ppm. [Selection figure] None |
| priorityDate | 2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.