http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009085989-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-24
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
filingDate 2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b40ada315d0789564192dceb9481ef6d
publicationDate 2009-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009085989-A
titleOfInvention Resin composition for forming fine pattern and method for forming fine pattern
abstract A resist pattern can be shrunk smoothly by heat treatment, and can be easily removed by subsequent aqueous alkali treatment. A resin composition for forming a fine pattern for refining a resist pattern, comprising a resin, a crosslinking component for crosslinking the resin, and a solvent, wherein the resin is represented by the following formula (1). The repeating unit (I) is contained. [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016224448-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101728746-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013097295-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013065878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016006493-A
priorityDate 2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7745
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426651553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423569047
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423016742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424658220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID584247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22571166
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8723
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450775499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407485093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18769249
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419572902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13536154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54376956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416007562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20732660
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425065579
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420253154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID226486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419657143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415795473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757620
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422035561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512385
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415756929
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638097
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448522932
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415996932
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428052838
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452189203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68148
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57200284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424354469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3314
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512444
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9265
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408834051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422075720
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11732
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457655803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID529308
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424557052
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9964460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID552631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393633
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11264
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422846730
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62347
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19083679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425920791
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421227834
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10998951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638071
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419743878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68863553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13627563
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14876011
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526596
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID347577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21943761
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416019410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID577531
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421766931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424557026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID234733
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424968158
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16683004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422038098
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512375
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12250212
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421465960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86781
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420087274
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512381
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22277875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411224273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415746057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414884102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20823171
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415793170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414879235
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86747194
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467175819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421067976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409344292
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68538764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393629
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549779
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15178391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID103015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419972811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11052916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75481
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12368
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411275235
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415789990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409010033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487839
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420208404
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420659603
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420533490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457311044
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538542
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3013921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415808585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415716413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25795
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415891980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15624
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421876396
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420348536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421170388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485457
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419855287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744642
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420154795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419668452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414880237
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515061
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75821
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6493
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20751976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518747
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414855554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22340176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID996
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11543

Total number of triples: 241.