http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009075084-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-483
filingDate 2008-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b25aa0739cdab85ebcb81a8b664d2a6
publicationDate 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009075084-A
titleOfInvention How to check the cleanliness using the cleaning confirmation indicator
abstract The present invention provides a method for confirming the degree of cleaning using an indicator for confirming cleaning, which can easily and reliably perform quantitative measurement of the cleaning effect. A method for confirming the degree of cleaning of an object to be processed using a cleaning confirmation indicator in which a detection layer formed of pseudo-contaminants is formed on a substrate, (1) a first step of arranging the cleaning confirmation indicator in an atmosphere in which a cleaning step with a cleaning liquid is performed prior to cleaning the object to be processed; (2) After the detection layer after passing through the first step is dyed with an acid dye, a color difference (ΔE * ab) between the surface of the base material or the detection layer before washing and the detection layer after dyeing is measured. 2 steps, A method for confirming the degree of cleaning, comprising: [Selection figure] None
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priorityDate 2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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