| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-369
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-335 |
| filingDate |
2007-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa6d3c775b97999fb3cf0f69fdabc984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80590cbed73651cedecb20ca3695cf4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_104f8a4efa34b5013135a0ce16f7edb5 |
| publicationDate |
2009-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009059959-A |
| titleOfInvention |
Microlens forming method for solid-state imaging device |
| abstract |
To provide a microlens forming method for a solid-state imaging device capable of reducing the pattern interval of microlens patterns in order to improve the light collection efficiency. In this microlens formation method, a microlens pattern 16 or a microlens 17 formed on a substrate 10 is coated with a film 18 of a pattern refinement coating forming agent, and then heated as necessary. Thereby, the pattern interval W of the microlens 17 can be reduced. This covering step may be performed after forming the microlens pattern 16 (E 1 ) or after bleaching (F 1 ) as in the step (E 1 / F 1 ) (W 0 > W 1 ). As in the step (H 1 ), the micro lens 17 may be formed by thermal flow (W 2 > W 3 ). [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120123409-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8766158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016190246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180066829-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018097084-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102396504-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011090115-A1 |
| priorityDate |
2007-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |