| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate |
2007-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36bc76c8a31b3e27885facf420c265f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_068099e1e6ba80a639c78fe2b162e7ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77ac1e66b5c6acb317618b13975945b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86db546f8a350b589ec0e80f6f22ce55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87bbd2c1791d306346a623bc22ecfd3c |
| publicationDate |
2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009031611-A |
| titleOfInvention |
Resin substrate |
| abstract |
An object of the present invention is to provide a resin substrate having excellent water vapor barrier properties and particularly excellent peel strength. A surface having a polyimide resin layer and at least one SiN layer mainly composed of silicon nitride formed on the polyimide resin layer by a chemical vapor deposition method at a film formation start temperature of 50 ° C. or higher. A resin substrate comprising a layer. [Selection] Figure 1 |
| priorityDate |
2007-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |