http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009004706-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
| filingDate | 2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_503030c6554a90edb8d7bb0941b29fbf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b40c88bba90b0055862e773423300d25 |
| publicationDate | 2009-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009004706-A |
| titleOfInvention | Nitride semiconductor evaluation method and evaluation apparatus |
| abstract | A nitride semiconductor evaluation method and evaluation apparatus capable of nondestructively and non-contacting the internal electric field of a nitride semiconductor are obtained. A sample of a nitride semiconductor is irradiated with a sound wave synchronized with a reference signal. The sample 15 is irradiated with probe light, and the probe light reflected or transmitted by the sample 15 is received and converted into an electrical signal. The electrical signal of the probe light is separated into a direct current component and an alternating current component. The direct current voltmeter 24 measures the direct current component in which the alternating current component is detected by the lock-in amplifier 25 synchronized with the reference signal. The modulation spectrum of the probe light is obtained by dividing the AC component by the DC component. The internal electric field of the sample 15 is obtained based on the period of the Franz-Keldish oscillation appearing in the modulation spectrum. [Selection] Figure 5 |
| priorityDate | 2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.