http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002516984-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0423 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0666 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1717 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 1999-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002516984-A |
| titleOfInvention | Apparatus and method for measuring properties of a structure |
| abstract | (57) Abstract: A method and apparatus for measuring a property of a structure having at least one layer (10) is disclosed. The apparatus comprises a laser (52) for generating an optical pulse (12), a beam splitter (62) for splitting the optical pulse into at least two excitation pulses (12 ', 12''), or on the structure or The excitation pulse is spatially and temporarily superimposed on the structure to form an excitation pattern (15) that emits sound waves that change the properties of the structure, for example, generate time-dependent surface ripples (17a, 17b). And a light source (54) for oscillating the probe beam (20) to generate a signal beam (20 '). By using a diffractive element such as a beam splitter, an image of the element is projected onto the structure, and by using a probe beam reflected by the structure as a signal beam, accurate and reliable. Measurement can be performed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011522227-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009004706-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101622418-B1 |
| priorityDate | 1998-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.