| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008539595-A |
| titleOfInvention |
Inclined plasma doping |
| abstract |
The plasma doping apparatus (100) includes a chamber (104) and a plasma source (162) that generates ions from the dopant gas into the chamber. A grating (154) is positioned in the chamber. A platen (148) that supports the target (150) is positioned in the chamber. At least one of the grating and the target is oriented such that dopant ions extracted from the grating strike the target at a non-normal incidence angle. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020521322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013511817-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7335815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016524787-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101811790-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018517229-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016029642-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101707563-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016540360-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013516071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014529166-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012523123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018507514-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010541249-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110135871-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012523122-A |
| priorityDate |
2005-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |