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filingDate 2005-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2008-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008532260-A
titleOfInvention Nonvolatile nanocrystal memory and method thereof
abstract The nanocrystalline nonvolatile memory (NVM) (10) has a dielectric (22) between the control gate (26) and the nanocrystal (16). The nitrogen content of the dielectric is sufficient to reduce the places where electrons can be trapped in the dielectric (22). This is obtained by grading the nitrogen concentration. The concentration of nitrogen is highest in the vicinity of the nanocrystal (16) where the electron / hole trap density tends to be maximum, and decreases towards the control gate (26) where the electron / hole trap density is lower. This has been found to have the beneficial effect of reducing the number of places where charge can be trapped.
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