| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2006-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008529280-A |
| titleOfInvention |
Novel polishing slurry and non-abrasive solution containing a multifunctional activator |
| abstract |
The present invention relates to aqueous slurry / solution compositions for chemical mechanical polishing / planarization (CMP) of substrates. In particular, the novel slurry / solution of the present invention provides a multifunctional activator that provides increased copper removal rate to the aqueous polishing slurry / solution while suppressing isotropic chemical etching and copper wire concavity. Including. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9022834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019069863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8592317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4658825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101268615-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007227583-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016031971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102370980-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101359197-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016017063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019069863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170038809-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101377902-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7006698-B2 |
| priorityDate |
2005-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |