| abstract |
The present invention relates to a fine-grained alkaline earth metal titanate and a method for its production by reaction of alkaline earth metal compounds with titanium dioxide particles. The titanium dioxide particles have a BET surface area higher than 50 m 2 / g. The titanium dioxide particles can have a very small content of sulfate, chloride and carbon. This reaction can be carried out at temperatures below 700 ° C. The alkaline earth metal titanate may have a BET surface area of 5 to 100 m 2 / g. This preferably has no hydroxyl groups in the crystal lattice. The alkaline earth metal titanates can be used for the production of microelectronic elements. |