| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2005-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008512862-A |
| titleOfInvention |
Selective etching method |
| abstract |
A group comprising semiconducting materials based on at least two different chemical elements by flowing a liquid etchant flowing over the substrate surface with a flow sufficiently fast to produce a minimum average velocity v parallel to the substrate surface A method of selectively etching a first material on a substrate selected from the above with a high selectivity to the second material is disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012501530-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10879076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019165218-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190122832-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103154321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6993998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019050365-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102352628-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4863093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012048079-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020517108-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102383130-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012048079-A2 |
| priorityDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |