http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008294016-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b8f840f17ddd1be9fe79e771cdf0d2dc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2007-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1572f264f02ac1a1e2ebc61a3a7c13a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3376c810cf03e997d968424d6ff2df5 |
| publicationDate | 2008-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008294016-A |
| titleOfInvention | Ceramic substrate and semiconductor manufacturing apparatus equipped with the same |
| abstract | PROBLEM TO BE SOLVED: To provide a ceramic substrate, particularly a shower substrate, for a semiconductor manufacturing apparatus having a greatly improved electrode connection structure so that the throughput of a semiconductor process can be improved. A ceramic substrate 1 is installed in a chamber of a semiconductor manufacturing apparatus and has a conductor 2 embedded therein, an electrode member 3 for connecting an external terminal connected to the conductor 2, and an electrode member 3. A conductive cover member 4 that is connected and covers the electrode member 3, and an O-ring 5 that shields the electrode member 3 covered with the cover member 4 from the atmosphere in the chamber. The electrode member 3 and the ceramic substrate 1 and the electrode member 3 and the cover member 4 are mechanically connected by screws or the like. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020184640-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018190218-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7099495-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009188396-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11195701-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018190218-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010182729-A |
| priorityDate | 2007-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.