http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008276182-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2008-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80acf29d41c626f58bbf03ec09fe213a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1037a749a7d25144305b690cd1dbda52 |
| publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008276182-A |
| titleOfInvention | Resist composition and pattern forming method using the same |
| abstract | [PROBLEMS] To solve the problem of performance improvement technology in microfabrication of a semiconductor device using actinic rays or radiation, particularly KrF excimer laser light, electron beam or EUV light, and has high sensitivity, high resolution, and good In addition, in LWR and KrF, a resist composition in which a standing wave and a swing due to resist film thickness fluctuation in a highly reflective substrate are reduced, and a pattern forming method using the same are provided. SOLUTION: (A) Resin having a specific (meth) acrylic acid ester-based repeating unit and a hydroxystyrene-based repeating unit having a carbonyl structure in a specific side chain, and (B) acid generation upon irradiation with actinic rays or radiation And a pattern forming method using the same. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010276924-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010134640-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009031350-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023189961-A1 |
| priorityDate | 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 137.