| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6813f68bbadbcaae3828aa035190fede |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate |
2008-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_701cc4f3f9df13fbfdfd91b4c746ee32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f0455e0df477e035ff064c796df79cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_070d53854267c5d45d8d1db213b3a190
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae0b843e4408fd726f22f88e9b6f5d4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d157cd39b1c0664d26260edc9350d878 |
| publicationDate |
2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008244502-A |
| titleOfInvention |
Temperature measuring device for wafer processing system |
| abstract |
Unnecessary vapor deposition on the tip of a temperature measuring device is prevented. A temperature measuring device for monitoring the temperature of a semiconductor substrate contained in a processing chamber so that a gas can be delivered into the processing chamber of the wafer processing system. The temperature measuring device extends through the surrounding sheath 1601 and the gas flux from the sheath 1601 prevents unwanted deposition on the tip of the temperature measuring device. [Selection] Figure 16 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013141159-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102232240-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497217-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101153244-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010135390-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017069414-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010064470-A1 |
| priorityDate |
2001-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |