http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008235479-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2007-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcf4340e8e1ff85fa9d0b70f31ac4cc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db47a1d6e1a4e4d7a401d984dffeafc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43d2e57f4ae85930c4eab0acc25038bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b97f67087d2035860d0499776c36468d |
| publicationDate | 2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008235479-A |
| titleOfInvention | Manufacturing method of semiconductor device |
| abstract | 【Task】 Provided is a method for manufacturing a semiconductor device, which uses a porous silica precursor film and can suppress generation of microscratches and peeling even when polishing is performed. [Solution] A semiconductor device manufacturing method includes: (a) a step of spin-coating a non-template type porous silica precursor film on a ground of a semiconductor wafer; and (b) from the outer periphery to the inner side of the porous silica precursor film. Including a step of spraying a rinsing liquid while scanning, and a step of forming an inclined portion whose thickness decreases toward the outside at the outer peripheral portion of the porous silica precursor film; and (c) curing the porous silica precursor film. Treating and converting to a porous silica membrane. [Selection] Figure 1-1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012060399-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014045171-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016115916-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8969172-B2 |
| priorityDate | 2007-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.