| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_045ff57e3207060cc4e7e91e57266a2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fa0ffefbb13de953d81e65f877afc7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_284b50dcb0552d9e6fad953246a2be33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c970d9ecddb35c551287eede7cf9d22 |
| publicationDate |
2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008231068-A |
| titleOfInvention |
Cyclic siloxane compound and positive resist composition using the same |
| abstract |
A cyclic siloxane compound capable of providing a positive resist composition having excellent physical properties as a resist and a positive resist composition using the same are provided. A compound represented by the following general formula (1) and / or a compound represented by the following general formula (1) is hydrosilylated with a divinyl compound represented by the following general formula (2). It is a cyclic siloxane compound obtained by subjecting a compound to a hydrosilylation reaction with a monovinyl compound represented by the following general formula (3). CH 2 = CH-R 2 -CH = CH 2 (2) CH 2 = CR 3 - (R 4) h -T (3) [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103229103-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012086370-A1 |
| priorityDate |
2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |