http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008222857-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333 |
| filingDate | 2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6447aed45f7552890d0a3062894cceaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a55a1ac76182d9688da99180d06355f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 |
| publicationDate | 2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008222857-A |
| titleOfInvention | Insulating film forming composition, silica-based film and method for forming the same |
| abstract | An insulating film forming composition having low hygroscopicity, a low relative dielectric constant and excellent mechanical strength, a silica-based film, and a method for forming the same are provided. A component (A): 100 to 10 mol% of a compound represented by the following general formula (1) and (B) component; 0 to 90 mol% of a compound represented by the following general formula (2) are hydrolyzed. It contains a polymer obtained by condensation and an organic solvent. R 1 a X 3-a Si- (R 3) c -SiX '3-b R 2 b ····· (1) ( wherein, R 1, R 2 is a hydrogen atom, an alkyl group, an alkenyl group , An alkynyl group, X and X ′ represent a halogen atom, R 3 represents an oxygen atom, a phenylene group or a group represented by — (CH 2 ) m — (m is an integer of 1 to 6); , B represents an integer of 0 to 3, and c represents 0 or 1.) R 4 d SiX ″ 4-d (2) (wherein R 4 represents the above R 1 , R 2 and And X ″ represents a halogen atom or an alkoxyl group, and d represents an integer of 0 to 3.) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014072243-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015172242-A |
| priorityDate | 2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 608.