http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008203373-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38dcd1650dba55489ed2a02a56f34637 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2007-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb57022dddda119b462c556ec491bee |
| publicationDate | 2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008203373-A |
| titleOfInvention | Halftone blanks and method for producing halftone blanks |
| abstract | PROBLEM TO BE SOLVED: To provide a halftone blank capable of easily manufacturing a halftone mask having a halftone characteristic not dependent on a wavelength. A translucent film 2, an etching stopper film 3, and a light shielding film 4 are sequentially formed on a transparent substrate 1. The etching stopper film 3 prevents the etching from proceeding to the semi-transmissive film 2 when the light shielding film 4 is etched. The light shielding film 4 and the semi-transmissive film 2 are films made of chromium. The semi-transmissive film 2 is formed with a thickness smaller than that of the light-shielding film 4 so as to obtain a predetermined semi-transmissive characteristic for performing halftone exposure. The semipermeable membrane 2 is formed by sputtering a chromium target in a mixed gas atmosphere of 50% argon and 50% carbon dioxide. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011075607-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015049282-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010134433-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017033004-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011027647-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014219575-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104423141-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009048089-A1 |
| priorityDate | 2007-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.