| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe40990744fb70df6c32d8919bdf5497 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D285-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C311-03 |
| filingDate |
2007-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69928d01b75510cb101c5799feaaf56f |
| publicationDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008189602-A |
| titleOfInvention |
Sulfonium salt |
| abstract |
The present invention provides a sulfonium salt having a function as a photoacid generator without causing the problem of poor compatibility between an acid generator and a polymer having an acid dissociable group, which is a main component of a photoresist. The sulfonium salt is represented by the following formula (1). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011033840-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013100261-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008189598-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008191413-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008189599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013205508-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013007785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010128432-A |
| priorityDate |
2007-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |