| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02A50-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 |
| filingDate |
2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54899a0aa7b9939676d51e715af44a33 |
| publicationDate |
2008-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008186660-A |
| titleOfInvention |
Electrode structure and plasma generating apparatus using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide an electrode structure excellent in corrosion resistance against atmospheric plasma and a plasma generation apparatus using the same. The present invention relates to an electrode structure 10 including an electrode 1 for generating plasma, which is used in a plasma generation apparatus 11, and has a RE 2 Si 2 O 7 on the surface on the plasma generation region 4 side. An electrode structure characterized in that a silicate layer 2a having a main crystal phase of a disilicate represented by (RE is a rare earth element) or a monosilicate represented by RE 2 SiO 5 (RE is a rare earth element) is formed. Is the body. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015172243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9062564-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020097784-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2284140-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2287135-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2287137-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7264026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9926805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10094237-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2319817-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9771826-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011068861-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023435-B2 |
| priorityDate |
2007-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |