| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_562de9eaba2b90ce100ddce9749e926d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332 |
| filingDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79d2e2e87f89059be18f69f82fbc262f |
| publicationDate |
2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008167171-A |
| titleOfInvention |
Method for manufacturing piezoelectric vibrating piece, piezoelectric vibrating piece and piezoelectric device |
| abstract |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrating piece in which a cross section of a vibrating arm of a piezoelectric vibrating piece (20) is formed into an accurate rectangular shape. A method of manufacturing a piezoelectric vibrating piece includes a step of preparing a flat piezoelectric material having etching anisotropy (S112), a step of forming a corrosion-resistant film on both surfaces of the piezoelectric material (S112), A first application step (S114) for applying a photoresist on both surfaces of the corrosion-resistant film, a first exposure step (S116) for exposing the pattern of the piezoelectric vibrating piece only on one side of the piezoelectric material, and a photo after the first exposure step The resist is developed to remove the corrosion-resistant film that appears only on one side (S118), and the first etching process (S126) to remove the corrosion-resistant film and etch the piezoelectric material that appears. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010050687-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014232965-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013175933-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011082735-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011160095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010193133-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016130644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010177820-A |
| priorityDate |
2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |