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filingDate 2007-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008153674-A
titleOfInvention Inkjet recording head and piezoelectric element
abstract A piezoelectric element that is driven at a low voltage is provided. The piezoelectric element includes a piezoelectric layer having a perovskite crystal structure, and an upper electrode and a lower electrode arranged with the piezoelectric layer interposed therebetween. The crystal axis direction of the columnar crystal grains with the (001) orientation in the piezoelectric layer (41) is set so as to form a predetermined angle (5 to 20 degrees) with the normal direction of the lower electrode (32) surface. The piezoelectric element having such a structure exhibits a piezoelectric characteristic comparable to that of the conventional product at a low voltage, and exhibits a higher piezoelectric characteristic than the conventional product at a voltage higher than that. It is optimal as a piezoelectric element that is driven at a low voltage. [Selection] Figure 1
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