http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008152213-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
filingDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b61fb1219b6bedfe5ba0f57f6bbdbd6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2a6564d37d593cb43a9d727ba2ef3bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af87f7f14f76735a6cd8f4c4a79a267 |
publicationDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008152213-A |
titleOfInvention | Resist coating film forming material and resist pattern forming method |
abstract | There are provided a resist coating film forming material capable of forming a coating film on a resist film without impairing lithography properties, and a resist pattern forming method using the resist coating film forming material. A resist coating film-forming material formed by dissolving a resin component (A) whose alkali solubility is increased by the action of an acid in an organic solvent (S), The resin component (A) has a structural unit (a) derived from an acrylate ester, and the organic solvent (S) is selected from the group consisting of an ether-based organic solvent and an alcohol-based solvent having no hydroxyl group A resist coating film-forming material comprising at least one organic solvent (S1). [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011053430-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015194583-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010212270-A |
priorityDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 295.