http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008128773-A

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filingDate 2006-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e56a29104908470133818b525941a1
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publicationDate 2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008128773-A
titleOfInvention Thin film gas sensor
abstract A thin film gas sensor for pulse driving that realizes ensuring temporal stability by keeping the oxygen adsorption amount of a gas sensitive part constant, suppressing a change in sensor resistance value of the gas sensitive part over time. A gas sensitive layer 52 having a laminated structure in which an SnO 2 layer 521 and an oxygen storage layer 522 made of an oxygen supplying substance (ceria / zirconia solid solution (CeZrO 4 ) or ceria (CeO 2 )) are alternately laminated. By mounting, the thin film gas sensor 1 is configured such that oxygen is distributed throughout the gas sensitive layer 52. [Selection] Figure 1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017020883-A
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Total number of triples: 25.