http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008088275-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D309-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f2053be723a5329e3d7a9c3d3aa07f4 |
| publicationDate | 2008-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008088275-A |
| titleOfInvention | Dendrimer, method for producing dendrimer, and resist composition |
| abstract | The present invention provides a low molecular weight material for a photosensitive resist having a high protection rate of alkali-soluble groups, a method for producing the same, and a resist composition capable of ultrafine processing using the material. The low molecular material is a first to fifth generation dendrimer, and the core (A) has an aromatic ring, an aromatic condensed ring, or two or more rings selected from these directly. Or a central part (C) having a structure selected from a chained hydrocarbon group, a linking ring linked via an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and the center part (C). Having two or more ether oxygen atoms linked directly or via a carbon atom to the ring, the dendron (B) is linked in a dendritic manner via an ether bond, and the outermost dendron is an aromatic ring or An aromatic condensed ring, at least one protected outer-side alkali-soluble group, and one core-side linking group, all of which are protected by an acid-dissociable, dissolution-inhibiting group. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014065560-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017227851-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921480-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9556094-B2 |
| priorityDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 269.