| abstract |
PROBLEM TO BE SOLVED: To provide a method for accurately detecting the presence or absence of minute magnetized particles with high sensitivity. The GMR sensor stripe array includes a plurality of GMR sensor stripes 1, 2, and 3 connected in series in a zigzag manner, and has high sensitivity for detecting magnetic particles bound to biological molecules attached to a substrate. Provide mechanism. The adverse effect of hysteresis, which is inconvenient in stabilizing the bias point for the magnetic moments 11, 22, 33 of the free layer, is that the sensor is biased along the vertical direction and the stress of the insulating layer 45 and the magnetic layer (free layer) By creating transverse compensated magnetic anisotropy using the magnetostriction of the layer and pinned layer). Also, the sensitivity of the GMR sensor stripe array is improved by making the size of the separation region 44 between the stripes smaller than the diameter of the magnetized particles and making the width of the stripes 11, 22, 33 equal to the diameter of the magnetized particles. To do. [Selection] Figure 1 |