http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007531309-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2005-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007531309-A |
| titleOfInvention | Method for controlling the trimming of a gate electrode structure |
| abstract | A method and processing tool for controlling the trimming of a gate electrode structure by determining a first dimension of the gate electrode structure, wherein the first dimension is selected for a process model to select a target trim dimension and generate a set of process parameters And feed forward the target trim dimensions and perform a trimming process on the gate electrode structure. When performing the trimming process, the process parameters are controlled, the gate electrode structure is trimmed, and the dimension of the gate electrode structure after trimming is measured. The trimming process is repeated at least once until the target trim dimensions are obtained. The post-trim dimensions are fed back to generate a new set of process parameters. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013085290-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016529736-A |
| priorityDate | 2004-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.