| abstract |
Disclosed is a photoacid generator (PAG) comprising a photoactive moiety and a perfluorinated polyfunctional anionic moiety (or initial anionic moiety) that provides a photoacid having high acid strength, low volatility and low diffusivity. The The invention further relates to photoacid generators such as those used in photoinitiation or acid catalyzed processes for applications such as photoresists and photopolymerization for microlithography. |