| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-152
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31713
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-301 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 |
| filingDate |
2004-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007507077-A |
| titleOfInvention |
Extraction method of ion beam slit with mass separation |
| abstract |
The present invention uses a mass analyzer comprising a pair of permanent magnets that select a desired ion species from a number of species in a ribbon ion beam. Permanent magnets provide a nearly uniform magnetic field of suitable size in a small area that cannot be achieved with an electromagnet that applies a specific force in the desired direction. This force is applied to the passing particles of the ribbon ion beam and changes the path of the particles according to the mass of each. As a result, ionic species selected from the beam by a force that prevents rejected species and / or contaminants from passing through the mass analyzer (eg, by striking a magnet and / or other barrier in the analyzer). Is obtained. A mass analyzer allows a dopant / species ion source that generates multiple species to be used in place of an ion source that provides a single dopant / species. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020051945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014203071-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020067114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11747288-B2 |
| priorityDate |
2003-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |