http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007301762-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 |
filingDate | 2006-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ea561c0f0c1a336a67e71ff0fc1be59 |
publicationDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007301762-A |
titleOfInvention | Nozzle plate manufacturing method, liquid discharge head, and image forming apparatus |
abstract | PROBLEM TO BE SOLVED: To obtain a nozzle having a uniform and wide-angle tapered portion. An exposure mask in which a light interference layer that transmits most and a light blocking layer made of a material that does not transmit light is formed on the same surface of the substrate when light is irradiated perpendicularly to the substrate, and the exposure mask is used. From the surface opposite to the surface of the exposure mask where the photosensitive material is formed, and the photosensitive material attaching step of applying a photosensitive material to the surface where the light interference layer and the light blocking layer are formed The first exposure step of irradiating the substrate with the parallel light of the wavelength substantially perpendicularly to the substrate, and the parallel light of the wavelength to the substrate from the surface opposite to the surface on which the photosensitive material of the exposure mask is formed, A nozzle plate manufacturing method comprising a second exposure step of rotating an exposure mask coated with the photosensitive material while tilting and irradiating from an oblique irradiation angle while maintaining the irradiation angle. By doing Solve the problem. [Selection] Figure 4 |
priorityDate | 2006-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.