http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001212965-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_171750900388cc1eb516511793bdb9e2 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-382 |
filingDate | 2000-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_141882eda0ccf33b9b3f8ab51cf58844 |
publicationDate | 2001-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2001212965-A |
titleOfInvention | Hole processing device and hole processing method |
abstract | (57) Abstract: An object of the present invention is to provide a processing apparatus capable of easily processing a discharge nozzle having a shape in which a flying direction of an ink droplet to be discharged is stable and no satellite is generated around the discharge nozzle. A folder having an inclined surface is fixed on a support table of a helicon etching apparatus, and a rotating member rotates along the inclined surface. A silicon wafer is placed and fixed on the rotating member 36. Chip substrate 11 on silicon wafer 23 (inkjet printer head 1) In the case of 0), the surface is circulated in the direction of 360 degrees with time and uniformly in accordance with the rotation of the rotating member 36, and is inclined by the inclination angle of the folder 22. Accordingly, in response to the change in the inclination posture of the inkjet printer 10 due to the rotation of the rotating member 36, the oxygen plasma 38 Oxygen plasmas 38-1, 39, 3 indicated by arrows with respect to -1 Irradiation is performed while forming a conical surface as shown in 8-2 and 41, and a divergent discharge nozzle 18 is formed. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8704127-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837887-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7588693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009107837-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101269527-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007301762-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100857629-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109434288-A |
priorityDate | 2000-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.