http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007298322-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d07a753379a58ece3ff3acad5b46d93a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be4e85bc6380d8508f4b075ca6bec735 |
| publicationDate | 2007-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007298322-A |
| titleOfInvention | Probe card |
| abstract | PROBLEM TO BE SOLVED: To provide a probe card capable of suppressing deformation of a silicon substrate. A contact substrate 3 for holding a contact probe 4 is formed by cutting out a (111) plane orientation with a relatively high Young's modulus. In this way, by using as the contact substrate 3 a silicon substrate cut out with a (111) surface orientation having a higher Young's modulus than when the surface orientation is (100), the deformation of the contact substrate 3 is reduced and deformation is suppressed. can do. [Selection] Figure 1 |
| priorityDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.