http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002139540-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate | 2000-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0b8647ca5003609505e6bcbfa650efb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cbabe8a81b2fa68400e14ee6e26791b |
| publicationDate | 2002-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002139540-A |
| titleOfInvention | Probe structure and manufacturing method thereof |
| abstract | (57) [Problem] To shorten the wiring from a probe pin to a connection electrode to a test board. A main board and a plurality of standing uprights at predetermined positions on the upper surface of the main board. The probe pins 3, the plurality of through electrodes 5 individually corresponding to the plurality of electrodes K1 of the inspection substrate K, and the rewiring layer 4 for individually connecting the probe pins 3 and the through electrodes 5 on the upper surface of the main body substrate. The probe pins 3 each have a silicon core as a core and a conductive film 32 attached to the surface thereof. Each through electrode 5 passes through the inside of the main body substrate 7 and reaches from one side to the other side. The pitch between the through electrodes exposed on the other surface side of the main substrate 7 was set to be larger than the pitch between the probe pins. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009130793-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008047832-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007298322-A |
| priorityDate | 2000-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.