| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0421
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0206 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-32341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-04252 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-042 |
| filingDate |
2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc9c397116f3670495be557e4a07d662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0f4a308fa2da1261fb7f7ed9dba3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e8e778d63db3c3e1bc0ebc3cabf455c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_712bb64654aadb2012316c6cd13005ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daf3f51f3a3d769d7a9553fb693ac9ae |
| publicationDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007273492-A |
| titleOfInvention |
Nitride semiconductor device and manufacturing method thereof |
| abstract |
A nitride semiconductor device capable of realizing low-resistance ohmic characteristics and high adhesion and a method for manufacturing the same are provided. A nitride semiconductor device includes an n-type GaN substrate on which a semiconductor element is formed, and an n electrode that is a metal electrode formed on the back surface of the GaN substrate. Between the GaN substrate 1 and the n-electrode 10, a surface modified layer 20 that functions as a carrier supply layer is provided. The surface modification layer 20 is formed by reacting and modifying the back surface of the GaN substrate 1 with a material containing silicon. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011176177-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015018841-A |
| priorityDate |
2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |