| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6638ac6b1020cd2c62d09d748bc1ab9 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d910389c0eb7d05fd5027d80144d7eaa |
| publicationDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007250987-A |
| titleOfInvention |
Solid-state electronic device and manufacturing method thereof |
| abstract |
An object of the present invention is to reduce an off-current and improve a subthreshold coefficient in a solid-state electronic device (transistor). A channel layer having a gate electrode 3 to which a control voltage is applied, a source electrode 4 and a drain electrode 5 whose conduction state is controlled by the control voltage, and generating a channel between the source electrode and the drain electrode 1 and a gate insulating film 2 that is provided between the gate electrode and the channel layer and is made of a dielectric material having a large equivalent relative dielectric constant. And the gate insulating film 2 are planarized so that the RMS value is 1 nm or less. [Selection] Figure 10 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013110177-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013021632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013051390-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9917109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9178076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I673555-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011211187-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101421304-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009141342-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013073347-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010021170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101421303-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111564509-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009141341-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011176153-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111564509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010062222-A |
| priorityDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |