http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007246980-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-50 |
| filingDate | 2006-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48e3670c36aff59b52bf28b1aa4a961c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c7740cff558a2d38ef00192c8f05a98 |
| publicationDate | 2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007246980-A |
| titleOfInvention | Electroless plating solution |
| abstract | An electroless plating solution of the present invention is an electroless plating solution used for selectively forming a protective film on a surface of a wiring exposed in manufacturing a semiconductor device having a wiring structure, It contains a cobalt ion, a second metal ion different from cobalt, a chelating agent, a reducing agent, a polyoxyethylene alkyl ether phosphate, and a tetraalkylammonium hydroxide represented by the following formula (1). Yes. In the above formula (1), R 2 , R 3 , R 4 and R 5 represent any group of an alkyl group and a hydroxyalkyl group. [Effect] According to the present invention, a cobalt-based alloy can be formed as a protective film with high selectivity on a wiring such as copper, and surface contamination of the exposed wiring and electromigration to the interlayer insulating film can be prevented. The wiring resistance can be increased and the possibility of plating metal deposition on other than the wiring can be avoided. Furthermore, the electroless plating solution of the present invention does not contain a component that is regarded as an environmental hormone and can suppress adverse effects on the use environment. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010027950-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017108153-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4538490-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551575-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009127101-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010027950-A3 |
| priorityDate | 2006-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 121.