http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007187924-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-06 |
| filingDate | 2006-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f275219eeec09d70adc861420630bb9 |
| publicationDate | 2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007187924-A |
| titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
| abstract | A pattern forming material capable of forming a high-definition pattern with high sensitivity by containing an organic boron compound and a predetermined sensitizer such as a thioxanthone compound, and a pattern forming apparatus and a pattern forming method Offer. When a photosensitive layer is formed using a photosensitive composition containing a binder, a polymerizable compound, a photopolymerization initiator, and a sensitizer, and the photosensitive layer is exposed and developed, the photosensitive layer is used. The thickness of the exposed portion of the layer is not changed after the exposure and development. The minimum energy of light used for the exposure is 0.1 to 50 mJ / cm 2 , the photopolymerization initiator is an organic boron compound, and The pattern forming is characterized in that the sensitizer is at least one selected from a condensed ring compound and an amine compound substituted with at least two aromatic hydrocarbon rings and aromatic heterocyclic rings. Material. Further, there are a pattern forming apparatus and a pattern forming method using the pattern forming material. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010122633-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9933701-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015083331-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012077227-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009534718-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015083331-A1 |
| priorityDate | 2006-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1115.