| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13099
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01024 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-742 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K1-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K1-00 |
| filingDate |
2005-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb0a2d1fd7dfc7a62e7a22efce723fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_056eaf00aba4682d1d70c1a8a714527c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1442021991d765f8011c45cdeed5e7e7 |
| publicationDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007125578-A |
| titleOfInvention |
Reflow apparatus, reflow method, and semiconductor device manufacturing method |
| abstract |
In a reflow apparatus using formic acid for cleaning the surface of a solder electrode, generation and scattering of reaction products due to the corrosive action of formic acid are prevented. An apparatus for performing a reflow process on a solder member formed on a substrate to be processed includes a processing chamber and a formic acid introduction mechanism for introducing an atmospheric gas containing formic acid into the processing chamber. A shield material made of a member having corrosion resistance against formic acid is disposed between the reflow processing section and the inner wall of the processing chamber. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014207835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015111424-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009081398-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9982157-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10722965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5880785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015045566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015068827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015100841-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021109199-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021141087-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9513211-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7005743-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020529922-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8865620-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101036131-B1 |
| priorityDate |
2005-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |