http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007106662-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-22 |
| filingDate | 2006-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c7517fe04d118e639399933fbceb783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd647d4868b051b2ec3cceb5d524b729 |
| publicationDate | 2007-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007106662-A |
| titleOfInvention | Metal fluoride single crystal pulling apparatus and method for producing metal fluoride single crystal using the apparatus |
| abstract | PROBLEM TO BE SOLVED: To stably manufacture a large single crystal of metal fluoride such as calcium fluoride having physical properties that can be used as an optical material or the like in an optical lithography technique by suppressing crystal breakage and mixing of bubbles during crystal pulling. To manufacture. In a crystal pulling apparatus for pulling a single crystal by bringing a seed crystal into contact with a molten metal fluoride in a crucible, the crucible is housed in the outer crucible (4) and the outer crucible. The inner crucible (5) is a double structure crucible, and the opening (20) in the gap space formed by the inner surface of the outer crucible and the outer surface of the inner crucible in the dual structure crucible has an opening shielding member ( 21) A single crystal pulling apparatus. Since the volatilization of the metal fluoride from the gap space (20) can be suppressed, the temperature change of the melt accompanying the volatilization and the volatile components come into contact with the low temperature part in the furnace and solidify, and then fall into the melt again Troubles associated therewith can be greatly suppressed. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150130077-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009040630-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009102194-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116676668-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101599338-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011105551-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016183105-A |
| priorityDate | 2005-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.