http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007088370-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cf5ed2bb9f51004891e082dfb48740f |
| publicationDate | 2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007088370-A |
| titleOfInvention | Aqueous polishing liquid and chemical mechanical polishing method |
| abstract | PROBLEM TO BE SOLVED: To provide an aqueous polishing liquid capable of producing an LSI having excellent storage stability, a rapid CMP speed, less scratches and improved flatness, and a chemical mechanical polishing method using the aqueous polishing liquid To provide. An oxidizing agent, a five-membered monocyclic compound having three or more nitrogen atoms, a compound in which a heterocyclic ring is condensed to the compound, a compound having at least two sulfur atoms in the molecule, and / or bromine or iodine An aqueous polishing liquid comprising an organic compound containing [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2457574-C1 |
| priorityDate | 2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 366.