| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75aa4769c1e6d8483bc818c8fad14ad7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2443 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2443 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2006-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24036f2612bc502d5e52efb47f722d5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e3895b254ee691093c7894b53edc891 |
| publicationDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007059397-A |
| titleOfInvention |
Manufacturing method of electrode for generating atmospheric pressure plasma, electrode structure and apparatus for generating atmospheric pressure plasma using the same |
| abstract |
An electrode manufacturing method and an electrode structure for generating an atmospheric pressure plasma capable of extending the life of the electrode and reducing the manufacturing cost of the electrode, and an apparatus for generating an atmospheric pressure plasma using the same. A plasma electrode structure includes a plate-type power supply electrode and a ground electrode that are parallel to each other in order to supply high-frequency power for plasma formation. Oxide coating layers 310 and 320 are uniformly formed on the entire surface of 311 and the ground electrode 321, and a plasma generation space 330 is formed between the power supply electrode 311 and the ground electrode 321. [Selection] Figure 3a |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019049230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011154973-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100988291-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009135095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014186900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101869617-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019049230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017061735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014154248-A |
| priorityDate |
2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |