http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007053186-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11542c44de3ee75f3ce575d976ab4930 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fc0db7fc6ff92243ecaa5a4fcf1c54f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0d3a6aa372e9dbbc6207f371d84d8b0 |
| publicationDate | 2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007053186-A |
| titleOfInvention | Organometallic compound supply container |
| abstract | [Problem] To obtain a certain reproducible amount of evaporation of an organometallic compound, and when the carrier gas flow rate is increased to increase the amount of evaporation of the organometallic compound, the decrease in the usage rate of the filled organometallic compound can be reduced. An organometallic compound supply container is provided. The top of the container is provided with the tip of a carrier gas introduction pipe, the bottom of the carrier gas outlet pipe is provided with a tip of the carrier gas, and a solid organic substance at room temperature in a carrier inert to the organometallic compound in the container. In an organometallic compound supply container filled with a carrier-supporting organometallic compound coated with a metal compound, the tip of the carrier gas introduction tube is disposed obliquely downward by 20 to 50 ° with respect to the horizontal direction. It is characterized by that. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022118744-A1 |
| priorityDate | 2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.