http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006516822-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006516822-A |
| titleOfInvention | Method and apparatus for improved fixed hardware |
| abstract | The present invention relates to an improved component for a plasma processing system, and more particularly to an interior chamber portion of a plasma processing chamber. Regarding fasteners. Furthermore, the invention relates to a method for manufacturing such a fastener. |
| priorityDate | 2003-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.