http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006328412-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D171-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-00 |
| filingDate | 2006-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bee50e65447e045d4dacda0c23cbbbf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23b38faf495ef66f65c951ab9200fa61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7c7b7993974f0609247bae85a8aa81f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0006d16911d2cd9218ae7f24b8d6b57 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd |
| publicationDate | 2006-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006328412-A |
| titleOfInvention | Method for producing polyarylene ether, film forming composition, film forming method and organic film |
| abstract | The present invention relates to a method for producing polyarylene ether and a film-forming composition containing polyarylene ether obtained thereby, and more specifically, as an interlayer insulating film material in a semiconductor element or the like, the content of metal impurities is small, and the ratio A film forming composition capable of forming an organic film excellent in dielectric constant characteristics and low leakage current characteristics is obtained. SOLUTION: After adding 5 to 300 parts by weight of an acidic compound to 100 parts by weight of polyarylene ether, a solution containing polyarylene ether is heated at 50 to 150 ° C. for 0.5 to 30 hours. A process for producing a polyarylene ether characterized by [Selection figure] None |
| priorityDate | 2002-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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