| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_013d996a4f6fa0f576767d6ad3926786 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10 |
| filingDate |
2005-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a1d59e2050de468d5cffcd1a14b44e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46ab46d6d89e27d68482aa1484782048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38644c7045d08a283076826886b028b5 |
| publicationDate |
2006-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006310678-A |
| titleOfInvention |
Substrate for forming fine surface structure, method for producing fine surface structure article, and fine surface structure article produced by the production method |
| abstract |
【Task】 Improving yield and accuracy in the production of fine surface structure articles including optical elements such as phase shifters. Since the surface of the substrate 2 used as a product substrate has fine unevenness due to polishing, the deposited thin film 4 is deposited on the surface and the back surface of the substrate 2 to reduce these unevenness by vacuum evaporation, sputtering, CVD. It is formed by a film forming method such as. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10985027-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018085491-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008221674-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017506765-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8545969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008233552-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10261223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009218554-A |
| priorityDate |
2005-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |