| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bfbdee85a8c3ff91ebfff2c019fdbab0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate |
2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a46c37d87061d9f4034d3cd41fcaede
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f4fdca0c5f199e79229060d93ceb481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04c473bd8ac8fb5d4eca6928c0908fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_439b1ffc34886f92e2f369eea7440f64 |
| publicationDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006278191-A |
| titleOfInvention |
Electrode for plasma jet generation |
| abstract |
A long-life electrode for generating a plasma jet capable of generating a low-temperature plasma jet in a pressure atmosphere near atmospheric pressure and reducing thermal damage to a substrate to be processed is provided. A plasma jet that discharges a discharge plasma generated by supplying a discharge gas 20 between a pair of coaxially arranged electrodes 3 and 6 and applying an alternating electric field as a plasma jet under a pressure near atmospheric pressure. In the generating electrode, the metal electrodes 3 and 6 arranged along the central axis are cooled by causing the discharge gas 20 supplied therein to flow in a spiral flow along the wall surface in the internal holes. Thus, a low temperature plasma jet is generated. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008096881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012528454-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5368114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021256030-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012522888-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103025039-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105478240-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011522381-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020057608-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101002082-B1 |
| priorityDate |
2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |